Silicon wafers storage

Silicon wafers, a particular attention in the manufacturing

Silicon wafers are manufactured within a cleanroom in order to avoid any environmental contamination.

Among the field the substrates are used, the scale is commonly micrometer and nanometer. The particles present in the air can be much bigger.

Considering these two points, it is absolutely important to insure the continuity from the cleanroom up to your experiments in order to be the most successful as possible within your topics.

Silicon wafers storage

The silicon wafer storage (or other materials) perfectly polished must be inventoried in controlled atmosphere area (Ideally in clean room) as soon as they are out from there double packaging sealed in clean room.

Actually, within an uncontrolled atmosphere area, there are always a residual particulate contamination that changes depending on the geographic situation.

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Moreover, contaminations are increasing in case of pollutions as the figure bellow shows. It reveals the evolution of the particle concentration on a diameter of 10 µm during the most important pollution peak in Grenoble and Lyon (France - 2016).

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According to their origins, the particles have different diameters but also different compositions either organic or mineral in majority.

Particle size

Particles have very different deposition velocities depending on their diameters. The table below shows the gap between a large range of particles.

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Deposition speed

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Any opening of the storage box outside a controlled area causes a particle pollution which can be detrimental for future experimentations.

Furthermore, this phenomenon increases in function of the surface properties. Therefore an Epi-ready surface mainly relevant Si-F endings instead of Si-OH endings (lowest electrostatic charges) will be contaminated faster.

Potential

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It is therefore preferable to save the wafers either in a controlled area or get individual packaging.

Packaging

Sil’tronix ST provides different kind of packaging for Si wafers in order to minimize the pollution risks depending the products requested.

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Do not hesitate to ask for the most relevant packaging in relation to your needs.

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