Silicon wafer specifications

Specifications

Diameter 1 inch (25.4mm) 2 inch (50.8mm) 3 inch (76.2mm) 4 inch (100mm) 5 inch (125mm) 6 inch (150mm)
Other diameters per request
Type & dopant  N-type: P (Phosphorus), Sb (Antimony), As (Arsenic)
 P-type: B (Boron)
 Undoped
Resistivity  CZ: from 1mOhm.cm to 150 Ohm.cm
 FZ: up to 10K Ohm.cm
Orientation On standard : (100) (110) (111)
On request : (211) (311) (411) (511) (711) (911)
(210) (310) (510) (910)
(531) (731)
Tolerance   Standard: ± 0.5°  On request: ± 0.05°
Off orientation   Up to 40°
Thickness 1" 2" 3" 4" 5" 6"
Standard (µm)  250 275 380 525 625 675
Tolerance (± µm)  15 25 25 20 20 20
On request   From 120µm to 15mm
Surface  As Cut, Lapped, Etched, Single side polished, Double side polished
1" 2" 3" 4" 5" 6"
Particle count 10-25 10-25 10-25 <10 <15 <15
TTV Std (µm) <10 <10 <10 <10 <10 <10
TTV min SSP (µm) 5 5 5 5 10 10
TTV min DSP (µm) 3 3 3 3 3 3
Bow (µm) <30 <30 <30 <30 <40 <40
Roughness  On polished surface: <1nm
Flatness  On polished surface: <1µm

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